1. Metrological systems
    • Metrological systems
    • Traceability and conformance to international standards
    • Error budgeting and allocation
    • Minimizing abbe offsets
    • Separation of metrology loops from structural loops
    • Range vs. Resolution in sensing
    • Software correcting using error maps
  1. Opto/Electro-mechanical systems
    • High frequency positioning
      • Piezoelectric actuation
      • Closed loop controls
      • Laser or capacitance displacement measurement
    • Confocal instrument design
    • Instrumentation for process control and analysis
  1. Mechanical stability
    • sub-micrometer stability over periods of days
    • systems with low coefficients of thermal expansion
    • monolithic manufacturing techniques
    • kinematic principals
    • Flexure system design